As manufacturing demands intensify in sectors such as semiconductor fabrication, aerospace, and vacuum deposition equipment, traditional bearings often face premature failure due to lubricant breakdown and material degradation under extreme conditions. CHG’s high-temperature bearings are expertly engineered for ultra-high vacuum environments and extreme heat resistance, delivering reliable, long-lasting performance where standard bearings cannot operate.
Engineered for High-Temperature and Vacuum-Compatible Applications
CHG high-temperature vacuum bearings feature advanced self-lubricating sintered alloy spacer joints composed of porous metal materials. These spacers store and gradually release solid lubricants (MoS₂) during operation, making our bearings ideal for cleanroom environments and applications where oil-based lubrication is ineffective or prohibited.
Key Technical Specifications and Benefits
Heat resistance up to 350°C , ideal for high-temperature vacuum applications
Vacuum resistance down to 10⁻⁶ Pa , suitable for ultra-high vacuum (UHV) environments
Up to 8 times longer service life compared to conventional oil-lubricated bearings
Oil-free, maintenance-free operation with solid lubrication
Resistant to ion bombardment and thermal cycling in thin film deposition processes
Materials and Construction for Durability and Clean Performance
Component | Material Description |
| Inner & Outer Rings | Martensitic stainless steel — heat and corrosion resistant |
| Balls | Martensitic stainless steel with MoS₂ solid lubricant coatin |
| Cage / Spacer | Porous sintered alloy spacer joints for solid lubricant releas |
| Lubricant | Solid lubricant: Molybdenum Disulfide (MoS₂) |
| Shields | Austenitic stainless steel — dust-proof, corrosion resistant |
The unique sintered alloy spacers provide a continuous supply of solid lubricant, ensuring smooth, long-term operation even in the harshest vacuum deposition and semiconductor manufacturing environments.
Typical High-Tech Applications
Our high-temperature bearings are widely adopted in critical high-tech manufacturing systems, including:
Ion Implantation Systems： Operating continuously under ultra-high vacuum in semiconductor fabs, requiring long-lasting, vapor-free lubrication.
Sputtering Equipment：Bearings withstand ion bombardment and extreme thermal cycles, ensuring reliable thin-film coating.
Vacuum Vapor Deposition (VVD) Equipment： Delivering clean, stable operation critical for uniform thin-film deposition in semiconductor and advanced material production.
Why Choose High-Temperature Bearings?
CHG offers industry-leading vacuum-compatible, high-temperature bearings engineered to outperform traditional oil-lubricated options by providing:
Superior reliability in clean, ultra-high vacuum environments
Extended lifespan with minimal maintenance
Specialized designs for critical industries such as semiconductor manufacturing, aerospace, and vacuum coating equipment
For expert guidance or customized solutions for high-temperature vacuum bearings, please contact us at info@chg-bearing.com. CHG is your trusted partner for precision bearings built to meet the most stringent industrial demands.
